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Nitrogen Trifluoride

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Nitrogen Trifluoride

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APPLICATION:

· Etching

Nitrogen Trifluoride is used in the plasma etching of silicon wafers.

·Material

Nitrogen Trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD

· Laser

Nitrogen Trifluoride is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers.

 

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